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- Plasma-induced damage on 90nm Cu dual Damascene technology devices is investigated. 研究了等離子體工藝對90nm銅大馬士革工藝器件的損傷.
- Dual Damascene Cu is being used to replace Al-Cu metal lines and W vias & plugs. Cu已經(jīng)被用來(lái)替代Al-Cu合金連線(xiàn)和W 塞，因為與鋁相比，Cu有較高的導電率與較強的抗遷移能力。
- Dual damascene technology of Cu / low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介紹了銅/低介電常數介電層的雙嵌入式工藝,該工藝已大規模應用于動(dòng)態(tài)記憶存儲器(DRAM)和邏輯電路器件中。
- Dual damascene technology of Cu/ low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介紹了銅/介電常數介電層的雙嵌入式工藝,該工藝已大規模應用于動(dòng)態(tài)記憶存儲器(RAM)邏輯電路器件中。
- Recently, copper electroplating also becomes an important process step for IC device manufacture due to the requirement of Dual Damascene process of copper interconnection. 近日來(lái)，對IC元件制造而言，由于金屬銅內連接雙鑲嵌制程的需求，電鍍銅也已經(jīng)變成一項重要制程步驟。
- Copper Dual Damascene processing for chip metallization, and C4(Flip-chip) technologies of planar array chip packaging interconnection cause the electrochemical technologies place in the most complication processing for chip fabrication processing. Cu芯片金屬化的雙大馬士革處理和面陣列芯片封裝互連的C4(倒裝)技術(shù)使電化學(xué)技術(shù)置于最復雜的制造工藝技術(shù)之間。
- This paper introduces basic technology of copper interconnect, including single and dual damascene technology, CMP technology, low k dielectric materials, barrier materials and reliability of copper interconnect. 文中介紹了基本的銅互連布線(xiàn)技術(shù) ,包括單、雙鑲嵌工藝 ,CMP工藝 ,低介電常數材料和阻擋層材料 ,及銅互連布線(xiàn)的可靠性問(wèn)題
- Copper/low k dual damascene processLI 雙嵌入式低k介電層/銅工藝技術(shù)
- The Study of FSG Etching in Non-Stop Layer Dual Damascene Structure 無(wú)中間層雙大馬士革中FSG刻蝕技術(shù)研究
- The wiring is faulty and needs to be replaced. 線(xiàn)路上有短路需要換線(xiàn)。
- A kite dangles from a telephone wire. 一只風(fēng)箏懸掛在電話(huà)線(xiàn)上晃來(lái)晃去。
- With deft fingers she untangled the wire. 她用靈巧的手指解開(kāi)了金屬線(xiàn)。
- The road opened out into a dual carriageway. 這條路已擴展成了復式車(chē)行道。
- The ground is shut in by a wire fence. 那塊地被鐵絲籬笆圍住。
- He examined the wiring scheme carefully. 他仔細檢查線(xiàn)路圖。
- The heavy wind cut off the wire. 大風(fēng)刮斷了電線(xiàn)。
- All this electrical wiring will take a day to set up. 所有這些電線(xiàn)架線(xiàn)要花一天時(shí)間安裝好。
- Anyone touching that wire could get badly shocked. 任何人碰到那根電線(xiàn)都會(huì )遭到嚴重的電擊。
- He got an application in under the wire. 他在截止日期前交了申請書(shū)。
- His land was fenced with barbed wire. 他的土地用鐵絲網(wǎng)圍著(zhù)。
