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- Plasma-induced damage on 90nm Cu dual Damascene technology devices is investigated. 研究了等離子體工藝對90nm銅大馬士革工藝器件的損傷.
- Dual Damascene Cu is being used to replace Al-Cu metal lines and W vias & plugs. Cu已經(jīng)被用來(lái)替代Al-Cu合金連線(xiàn)和W 塞，因為與鋁相比，Cu有較高的導電率與較強的抗遷移能力。
- Dual damascene technology of Cu / low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介紹了銅/低介電常數介電層的雙嵌入式工藝,該工藝已大規模應用于動(dòng)態(tài)記憶存儲器(DRAM)和邏輯電路器件中。
- Dual damascene technology of Cu/ low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介紹了銅/介電常數介電層的雙嵌入式工藝,該工藝已大規模應用于動(dòng)態(tài)記憶存儲器(RAM)邏輯電路器件中。
- Recently, copper electroplating also becomes an important process step for IC device manufacture due to the requirement of Dual Damascene process of copper interconnection. 近日來(lái)，對IC元件制造而言，由于金屬銅內連接雙鑲嵌制程的需求，電鍍銅也已經(jīng)變成一項重要制程步驟。
- Copper Dual Damascene processing for chip metallization, and C4(Flip-chip) technologies of planar array chip packaging interconnection cause the electrochemical technologies place in the most complication processing for chip fabrication processing. Cu芯片金屬化的雙大馬士革處理和面陣列芯片封裝互連的C4(倒裝)技術(shù)使電化學(xué)技術(shù)置于最復雜的制造工藝技術(shù)之間。
- This paper introduces basic technology of copper interconnect, including single and dual damascene technology, CMP technology, low k dielectric materials, barrier materials and reliability of copper interconnect. 文中介紹了基本的銅互連布線(xiàn)技術(shù) ,包括單、雙鑲嵌工藝 ,CMP工藝 ,低介電常數材料和阻擋層材料 ,及銅互連布線(xiàn)的可靠性問(wèn)題
- Copper/low k dual damascene processLI 雙嵌入式低k介電層/銅工藝技術(shù)
- The Study of FSG Etching in Non-Stop Layer Dual Damascene Structure 無(wú)中間層雙大馬士革中FSG刻蝕技術(shù)研究
- David is famous for his billiards technic. 大衛因他的臺球技術(shù)而出名。
- The road opened out into a dual carriageway. 這條路已擴展成了復式車(chē)行道。
- dual damascene 雙大馬士革
- dual damascene process 雙嵌入（雙大馬士革）工藝
- His dual role as a composer and a conductor made him very busy. 他作曲家和指揮家的雙重身份使他非常繁忙。
- At that point, the road opens out and becomes a dual carriageway. 公路在那個(gè)地方變寬了，變成了雙車(chē)道。
- The choice of rivet in riveting technics. 鉚接工藝中鉚釘的選擇。
- This truly is a Damascene conversion. 這確實(shí)是一次質(zhì)的轉變。
- How to transfer the fool technics? 如何調用傻瓜工藝呢?
- Plane Design and Printing Technics. 平面設計策劃及印刷工藝。
- His painting technic provided example to posterity. 在繪畫(huà)技巧方面,他給后人提供了許多借鑒。
