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- The Study of FSG Etching in Non-Stop Layer Dual Damascene Structure 無(wú)中間層雙大馬士革中FSG刻蝕技術(shù)研究
- Plasma-induced damage on 90nm Cu dual Damascene technology devices is investigated. 研究了等離子體工藝對90nm銅大馬士革工藝器件的損傷.
- Dual Damascene Cu is being used to replace Al-Cu metal lines and W vias & plugs. Cu已經(jīng)被用來(lái)替代Al-Cu合金連線(xiàn)和W 塞,因為與鋁相比,Cu有較高的導電率與較強的抗遷移能力。
- Dual damascene technology of Cu / low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介紹了銅/低介電常數介電層的雙嵌入式工藝,該工藝已大規模應用于動(dòng)態(tài)記憶存儲器(DRAM)和邏輯電路器件中。
- Dual damascene technology of Cu/ low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介紹了銅/介電常數介電層的雙嵌入式工藝,該工藝已大規模應用于動(dòng)態(tài)記憶存儲器(RAM)邏輯電路器件中。
- Recently, copper electroplating also becomes an important process step for IC device manufacture due to the requirement of Dual Damascene process of copper interconnection. 近日來(lái),對IC元件制造而言,由于金屬銅內連接雙鑲嵌制程的需求,電鍍銅也已經(jīng)變成一項重要制程步驟。
- Copper Dual Damascene processing for chip metallization, and C4(Flip-chip) technologies of planar array chip packaging interconnection cause the electrochemical technologies place in the most complication processing for chip fabrication processing. Cu芯片金屬化的雙大馬士革處理和面陣列芯片封裝互連的C4(倒裝)技術(shù)使電化學(xué)技術(shù)置于最復雜的制造工藝技術(shù)之間。
- This paper introduces basic technology of copper interconnect, including single and dual damascene technology, CMP technology, low k dielectric materials, barrier materials and reliability of copper interconnect. 文中介紹了基本的銅互連布線(xiàn)技術(shù) ,包括單、雙鑲嵌工藝 ,CMP工藝 ,低介電常數材料和阻擋層材料 ,及銅互連布線(xiàn)的可靠性問(wèn)題
- Copper/low k dual damascene processLI 雙嵌入式低k介電層/銅工藝技術(shù)
- The road opened out into a dual carriageway. 這條路已擴展成了復式車(chē)行道。
- The two halves of the structure didn't marry up. 該結構的兩部分未配合好。
- High winds put great stress on the structure. 大風(fēng)作用于該建筑物上而產(chǎn)生巨大的應力。
- The structure had keeled over in the high winds. 那座建筑物讓大風(fēng)給刮倒了。
- A fan-shaped anatomical structure. 扇形器官扇形的解剖結構
- A secluded structure, such as a bower, in a garden. 涼亭一種在花園中建造的隱蔽性建筑物,如涼亭
- dual damascene 雙大馬士革
- The microscopic structure of tissue. 組織機構組織的微觀(guān)結構
- dual damascene process 雙嵌入(雙大馬士革)工藝
- We visited the museum, a steel and glass structure. 我們參觀(guān)了博物館,它是一座鋼和玻璃的建筑物。
- We know a lot about the structure of genes now. 如今我們對基因的結構有了較多的了解。