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- Plasma-induced damage on 90nm Cu dual Damascene technology devices is investigated. 研究了等離子體工藝對90nm銅大馬士革工藝器件的損傷.
- Dual Damascene Cu is being used to replace Al-Cu metal lines and W vias & plugs. Cu已經(jīng)被用來(lái)替代Al-Cu合金連線(xiàn)和W 塞，因為與鋁相比，Cu有較高的導電率與較強的抗遷移能力。
- Dual damascene technology of Cu / low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介紹了銅/低介電常數介電層的雙嵌入式工藝,該工藝已大規模應用于動(dòng)態(tài)記憶存儲器(DRAM)和邏輯電路器件中。
- Dual damascene technology of Cu/ low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介紹了銅/介電常數介電層的雙嵌入式工藝,該工藝已大規模應用于動(dòng)態(tài)記憶存儲器(RAM)邏輯電路器件中。
- Recently, copper electroplating also becomes an important process step for IC device manufacture due to the requirement of Dual Damascene process of copper interconnection. 近日來(lái)，對IC元件制造而言，由于金屬銅內連接雙鑲嵌制程的需求，電鍍銅也已經(jīng)變成一項重要制程步驟。
- Copper Dual Damascene processing for chip metallization, and C4(Flip-chip) technologies of planar array chip packaging interconnection cause the electrochemical technologies place in the most complication processing for chip fabrication processing. Cu芯片金屬化的雙大馬士革處理和面陣列芯片封裝互連的C4(倒裝)技術(shù)使電化學(xué)技術(shù)置于最復雜的制造工藝技術(shù)之間。
- This paper introduces basic technology of copper interconnect, including single and dual damascene technology, CMP technology, low k dielectric materials, barrier materials and reliability of copper interconnect. 文中介紹了基本的銅互連布線(xiàn)技術(shù) ,包括單、雙鑲嵌工藝 ,CMP工藝 ,低介電常數材料和阻擋層材料 ,及銅互連布線(xiàn)的可靠性問(wèn)題
- Copper/low k dual damascene processLI 雙嵌入式低k介電層/銅工藝技術(shù)
- The Study of FSG Etching in Non-Stop Layer Dual Damascene Structure 無(wú)中間層雙大馬士革中FSG刻蝕技術(shù)研究
- The method seems good but it needs to be tried out. 這個(gè)方法似乎不錯，但需要試驗一下。
- The road opened out into a dual carriageway. 這條路已擴展成了復式車(chē)行道。
- I can't claim infallibility for this method. 我不敢說(shuō)這方法絕對有效。
- Summer fallow is the best method of destroying weeds. 夏季休耕是消滅雜草的最好辦法。
- Popularizing this new method is not an easy job. 推廣這種新方法不是件容易的工作。
- This is not an economical method of heating. 這不是一種經(jīng)濟的取暖方式。
- I have a simple and easy method. 我有個(gè)簡(jiǎn)易的方法。
- I went through by a summary method. 我成功運用了一個(gè)簡(jiǎn)易的方法。
- By this method, you obtain a good result. 用這種方法，你就會(huì )取得良好的結果。
- Many times has he tried that method. 那種方法他已經(jīng)試驗許多次了。
- dual damascene 雙大馬士革
