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- Dual Damascene Cu is being used to replace Al-Cu metal lines and W vias & plugs. Cu已經(jīng)被用來(lái)替代Al-Cu合金連線(xiàn)和W 塞,因為與鋁相比,Cu有較高的導電率與較強的抗遷移能力。
- Plasma-induced damage on 90nm Cu dual Damascene technology devices is investigated. 研究了等離子體工藝對90nm銅大馬士革工藝器件的損傷.
- Dual damascene technology of Cu / low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介紹了銅/低介電常數介電層的雙嵌入式工藝,該工藝已大規模應用于動(dòng)態(tài)記憶存儲器(DRAM)和邏輯電路器件中。
- Dual damascene technology of Cu/ low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介紹了銅/介電常數介電層的雙嵌入式工藝,該工藝已大規模應用于動(dòng)態(tài)記憶存儲器(RAM)邏輯電路器件中。
- Recently, copper electroplating also becomes an important process step for IC device manufacture due to the requirement of Dual Damascene process of copper interconnection. 近日來(lái),對IC元件制造而言,由于金屬銅內連接雙鑲嵌制程的需求,電鍍銅也已經(jīng)變成一項重要制程步驟。
- Copper Dual Damascene processing for chip metallization, and C4(Flip-chip) technologies of planar array chip packaging interconnection cause the electrochemical technologies place in the most complication processing for chip fabrication processing. Cu芯片金屬化的雙大馬士革處理和面陣列芯片封裝互連的C4(倒裝)技術(shù)使電化學(xué)技術(shù)置于最復雜的制造工藝技術(shù)之間。
- This paper introduces basic technology of copper interconnect, including single and dual damascene technology, CMP technology, low k dielectric materials, barrier materials and reliability of copper interconnect. 文中介紹了基本的銅互連布線(xiàn)技術(shù) ,包括單、雙鑲嵌工藝 ,CMP工藝 ,低介電常數材料和阻擋層材料 ,及銅互連布線(xiàn)的可靠性問(wèn)題
- Copper/low k dual damascene processLI 雙嵌入式低k介電層/銅工藝技術(shù)
- The Study of FSG Etching in Non-Stop Layer Dual Damascene Structure 無(wú)中間層雙大馬士革中FSG刻蝕技術(shù)研究
- She knows why the metal is the good conductor. 她知道金屬為什么是好的導體。
- The road opened out into a dual carriageway. 這條路已擴展成了復式車(chē)行道。
- Can I fasten these metal plates with rivets? 我可以用鉚釘把這些金屬板固定在一起嗎?
- You need a strong adhesive to bond wood to metal. 需要強力膠才能把木料粘在金屬上。
- The car was now just a pile of twisted metal. 那輛汽車(chē)已經(jīng)成了一堆壓縮的廢鐵了。
- The metal basin clattered down the stone stairs. 金屬盆子沿著(zhù)石階滾了下去,發(fā)出咣啷聲。
- Aluminum is a kind of light silvery metal. 鋁是一種輕薄并呈銀色的金屬。
- The aeroplane wing showed signs of metal fatigue. 機翼顯出有金屬疲勞的現象。
- The metal frame tends to twist under pressure. 這種金屬框受壓後容易變形。
- dual damascene 雙大馬士革
- The ship was broken up for scrap metal. 這艘船拆毀了當廢鐵用。