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- PECVD法PECVD
- PECVD法低溫形成納米級薄介質(zhì)膜擊穿特性的實(shí)驗研究Experimental study of breakdown characteristic of thin dielectric film in nanometre range formed by low temperature PECVD
- 法law
- 無(wú)法unable
- PECVD法淀積氮化硼薄膜場(chǎng)發(fā)射特性研究Electron Emission Characteristics of BN Films Synthesized by PECVD
- 用法usage
- 說(shuō)法statement
- 低溫PECVD法形成納米級介質(zhì)膜微觀(guān)結構研究Study of Microscopical Structure for the Dielectric Film in Nanometre Range Formed by Low Temperature PECVD
- M-PECVDM-PECVD
- ECR-PECVDECR-PECVD
- 輸入法input method
- DBD--PECVDDBD - PECVD
- 用于薄介質(zhì)柵的PECVD法低溫形成SiO_xN_y薄膜及其電學(xué)特性SiO_xN_y Thin Film Formed by Low Temperature PECVD and Its Electrical Characteristics for Thin Dielectric Gate Application
- 除法division
- 分析法analytical method
- 商法commercial law
- 行政法administrative law
- PECVD法低溫形成SiO_xN_y介質(zhì)膜的俄歇電子能譜和紅外吸收光譜分析Analysis of Auger electron spectrum and infrared absorption spectra of the SiO_xN_y thin dielectric film formed by low temperature PECVD
- 賓夕法尼亞Pennsylvania
- 讀法pronunciation
