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- 袖珍濺射PIG離子源A compact sputtering PIG ion source
- 離子源的濺射特性及其對ZnS薄膜折射率的影響Study on sputter property and effect of ion source on refractive index of ZnS film
- 中文關(guān)鍵詞：氣離濺射、離子源、陽(yáng)極層流、濺射、氮化鈦、離子鍍膜、中頻、脈沖直流。KEYWORDS : GIMS, ion source, anode layer, sputtering, TiN, ion plating, medium frequency, pulsed DC.
- 用微波電子自旋共振等離子源離子注入增強濺射沉積法在玻璃表面制備氧化銦膜Preparation of Indium Oxide Film on Glass Surface Using Sputtering Deposition Synchro-enchanced by Microwave ECR Plasma Source lon-implantation
- 濺射態(tài)as-deposited
- 射頻離子源radio-frequency ion source
- 濺射角Deposition surface inclination angle
- 預濺射presputter
- 射頻火花離子源radio-frequency spark ion source
- 交替濺射alternating sputtering
- 濺射功率sputtering power
- 用于薄膜制備的射頻寬束離子源的設計Development of Broad Beam RF Ion Source for Thin Film Growth
- 濺射氣壓sputtering pressure
- 自制激光離子源射頻離子阱質(zhì)譜儀性能的測試Test of the Performance of the Self-Designed Radio-frequency Ion Trap Mass Spectrometer Interfaced with a Laser Desorption Ion Source
- 間歇濺射fitful-sputtering
- 濺射時(shí)間sputtering time
- 磁空濺射magnetron sputtering
- 中頻濺射mid-frequency sputtering
- 濺射制備DC sputtering
- 磁控濺射鋁aluminium control in magnetron sputtering
