The fabric is converted into wipes and laundered in an EDI water system and processed in a cleanroom to further reduce contamination. 織物經轉化成為抹布,并在電子數據交換純水系統中清洗,其清洗加工都在凈化室內完成,進一步減少污染。
This article elaborated the new process of mixed-bed inner resin regeneration in the modern large-scale microelectronics industry highly pure water. 摘要本文詳細介紹了在現代大型微電子工業用高純水系統中,混床內樹脂再生的新工藝。