Furthermore, in terms of the analytical results, the piezoelectric cantilever microactuators are designed and optimized, and the optimal methods are put forward. 根據此分析結果,進(jìn)一步優(yōu)化了壓電懸臂梁型微執行器的設計,并給出了優(yōu)化的方法。
A concise deflection model for piezoelectric cantilever microactuators is derived using the radius of curvature of piezoelectric multilayer cantilevers. 摘要利用壓電多層膜懸臂梁的形變曲率半徑,導出了簡(jiǎn)潔的壓電懸臂梁型微執行器的偏轉模型。