The method has been successfully used in the system for measuring the 3-D surface topography of diffractive optical elements. 此方法已成功地應用于自行研制的衍射光學(xué)元件三維表面形貌測量系統中。
The progress situations of Optical 3D shape measurement technique are presented in this paper, especially Grating Projection Profilometry and Digital Holography Profilometry. 本文對現階段被廣泛采用的光學(xué)三維形貌測量技術(shù)的發(fā)展現狀進(jìn)行詳細介紹,重點(diǎn)分析現已應用在三維形貌測量中的光柵投影技術(shù)和數字全息技術(shù)。