MBE has a lot of unique advantages because it supplies precise controls of the film growth processes and conditions far from equilibrium. 由于它能對薄膜生長(cháng)進(jìn)行精確的控制,并且是一種遠離平衡態(tài)的生長(cháng)技術(shù),因而它具有許多獨特的技術(shù)優(yōu)勢。
The structrures of diamond micromotor and microresonator are fabricated to demonstrate two kinds of selective growth thechnologies of CVD diamond film respectively. 以金剛石微馬達和微型諧振子結構制備為例,介紹化學(xué)氣相沉積金剛石薄膜的兩種選擇生長(cháng)技術(shù)。