Zr-Si-N film is a composite that is composed of nanocrystalline-ZrN and amorphous Si3N4.Zr-Si-N film is an excellent diffusion barrier and has good application potential.

 
  • Zr-Si-N膜由納米晶ZrN與非晶Si3N4組成雙相復合結構,是一種性能優(yōu)良的擴散阻擋層,具有很大的應用前景。
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