Vertical scanner is the supporting part of a series process ion implanter, which transfer high speed movement from outside of the chamber to the target inside.

 
  • 垂直掃描機構是單晶片離子注入機靶盤(pán)的支撐部件,起著(zhù)將高速直線(xiàn)運動(dòng)從靶室外傳遞到靶盤(pán)的作用。
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