Using the pressure-frequency characteristic, the GaAs cantilever acoustic sensor based on RTD is designed and processed by the control hole technology firstly, and the process integration of RTD and micro-mechanical technology is implemented.
英
美
- 利用此壓力-頻率轉換特性；首次設計并利用微機械控制孔技術(shù)加工制作了基于RTD的GaAs基懸臂式聲傳感器結構；實(shí)現了RTD與GaAs基微機械加工技術(shù)的工藝集成.
