Using plasma enhanced chemical vapor deposition system, intrinsic hydrogenated nanocrystalline silicon films and P-doped ones have been fabricat ed. The dependence of Raman shift on the grain size and doping concentration has been systemically studied.
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美
- 通過(guò)等離子增強化學(xué)氣相沉積法 ;制備了本征和摻磷的氫化納米硅薄膜 (nc- Si:H) ;研究了晶粒尺寸和摻雜濃度對納米硅薄膜喇曼譜的影響 .