Turning wafers and making the melatope form the round track,plenty of measuring points are fit to gain the radius of the circle and the coordinate of the circle center by least squares method.

 
  • 轉動(dòng)晶片使光軸的出露點(diǎn)形成圓形軌跡,通過(guò)最小二乘法對多個(gè)測試點(diǎn)擬合得到圓半徑和圓心坐標。
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