This design doubles the sensitivity by putting the piezoresistor on the surface of the vertical sidewall of the cantilevers, compared with conventional design.

 
  • 傳感器采用在深槽側壁(懸臂梁彎曲的表面)制作壓阻的方法,靈敏度比在硅表面上制作壓阻的傳統器件高近一倍。
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