Theoretical analysis showed that under well specified conditions, electromagnetic slow wave can interact stationary with moving periodic structure,based on that the a working principle can be proposed for a class of MEMS motor and actuator.
英
美
- 理論分析表明,在特定的條件下,電磁慢波與運動(dòng)周期結構之間可以發(fā)生穩定的相互作用,這能夠成為一大類(lèi)MEMS電機或執行器的一種不同的工作原理。
