Then the excimer laser etching on polymethyl methacrylate (PMMA) plate mechanism is studied, with the etching rate curves listing by experiments.

 
  • 研究了準分子激光對聚甲基丙烯酸甲脂(PMMA)基片的刻蝕機制,獲得了刻蝕曲線(xiàn)。
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