Their microstructure was studied by Raman and SEM and the phenomena were analyzed by phonon confinement theory and the surface effects of nanocrystallites on Raman shift.

 
  • 然后用快速光熱退火爐(RTP)在600℃下對樣品進(jìn)行了7m in的退火處理,借助Ram an和SEM對退火前后硅薄膜微結構進(jìn)行了研究,并用聲子限域理論和納晶表面效應對實(shí)驗現象進(jìn)行了分析。
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