The synthesis, structure, properties and process interaction of low k dielectrics are reviewed.Characterization techniques for low k dielectric films are summarized.

 
  • 綜述了低介電常數介質(zhì)薄膜的制備方法、結構與性能表徵、工藝兼容性等領(lǐng)域的最新進(jìn)展。
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