The surface morphology and properties of the thin-films were investigated by four-point probe(FPP)sheet resistance measurement, AFM,SEM,Alpha-step IQ profilers and XRD,also the effects of N and AI doping on diffusion barrier property were discussed.
英
美
- 用四探針電阻測試儀(FPP)、AFM、SEM、Alpha-step IQ臺階儀和XRD等分析測試方法對樣品的形貌結構與特性進(jìn)行了分析表征,并對N和Al的摻雜機理進(jìn)行了討論。
