The structure and the function of multi-arc and sputtering coating machine are reviewed, and the coating properties of TiN+Au (IPG) are prepared by this kind of machine discussed.

 
  • 摘要本文回顧了多弧-磁控濺射多功能離子鍍膜設備的結構和功能,并且對該設備在氮化鈦摻金離子鍍(IPG)方面的典型應用,做了較為詳細的膜層性能分析。
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