The static analysis of mirror with support structure was made by means of FEM, The mirror is improved &its structure is selected to meet the WFE specification.

 
  • 以鏡面面型精度為評價(jià)指標,對支撐結構進(jìn)行了有效的改進(jìn),并最終確定了滿(mǎn)足要求的支撐結構方案。
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