The results present that with the oxygen, the structure of Ti(CNO) films is fine grains instead of the columar grains of TiN.

 
  • 研究結果表明;Ti(CN)薄膜內加入氧后可以消除薄膜的柱狀晶結構;薄膜的斷口呈致密的纖維狀組織.
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