The result provides the theoretic basis to improve the symmetry of the output curve of the sensor with Barber-Poles and optimize the performance of the AMR sensor.

 
  • 通過(guò)對傳感器單元制備工藝的不斷摸索,解決了工藝過(guò)程中磁電阻條腐蝕、Barber圖形光刻與磁電阻單元制備各階段的表面處理等關(guān)鍵的工藝問(wèn)題,提高了單元器件制備的成品率。
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