The residual stress of CVD diamond films with different deposition process parameters was measured by X-ray transmission method, and analyzed.

 
  • 摘要用X射線(xiàn)衍射透射法測量了不同沉積工藝CVD自支撐金剛石薄膜的殘馀應力,并對應力測試結果進(jìn)行初步分析。
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