The research introduced a domestic microwave plasma chemical vapordeposition (MPCVD) equipment with a quartz glass window and water-cooledstainless steel reaction chamber in 2450MHz/5 Kw.

 
  • 本文詳細介紹了自行研制的2450MHz/5KW帶有石英玻璃窗、水冷卻不銹鋼腔體微波等離子體化學(xué)氣相沉積(MPCVD)裝置。
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