The relative error between the EOT extracted by this two-step approach and by the quantum corrected Poisson equation is less than 5%,thus validating the approach.

 
  • 采用該兩步法提取的HfO2高k柵介質(zhì)EOT與包含量子修正的Poisson方程數值模擬結果對比;誤差小于5%25;驗證了該方法的正確性.
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