The relation between form errors of the flat mirror under test and wave-front aberrations, i.e., influence function, can be obtained through sampling the pupil plane.

 
  • 摘要通過(guò)在光瞳面上取點(diǎn)的方法,找出被檢平面鏡面形誤差與檢驗系統波像差之間的相互關(guān)系,即影響函數。
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