The relation between characteristics of hot cathode glow discharge and diamond film deposition techniques in hot cathode glow discharge plasma chemical vapor deposition process was discussed.

 
  • 研究了在熱陰極輝光放電等離子體化學(xué)氣相沉積金剛石膜過(guò)程中,熱陰極輝光放電特性與金剛石膜沉積工藝的關(guān)系。
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