The quality of DLC films on metal substrate is better, and there properties excel the DLC films on non-metallic substrate.

 
  • 采用DBD一CVD法在不同襯底上成功沉積出DLC薄膜,相對而言,在金屬襯底上沉積的薄膜質(zhì)量較高,性能優(yōu)于非金屬襯底。
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