The polished InP substrate is put in the dense etchant of HCl,a etched groove pattern can be observed on the polished surface,It can be found that the orientation of the etched grooves is coincided with[110]on(001) InP.

 
  • 將去掉機械劃痕的 InP 襯底放入濃 HCl,發(fā)現腐蝕出的條形溝方向是和片子的[110]方向一致。
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