The plasma produced by an electric discharge of helium with the pressure range 100~700 Pa in a closed cavity is diagnosed by this way at three frequencies of 6.2,6.8 and 7.4 GHz. As a comparison,the Langmuir double probe method is used at the same time.

 
  • 使用該方法對100~700 Pa范圍內氦氣輝光放電等離子體進(jìn)行了診斷;選擇6.;2;6
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