The photoresist with high resolution is made by reducing the viscosity and the solidification contraction ratio when the elasticity and solidification velocity are taken into account.

　
英 美
  • 通過(guò)降低黏度和固化收縮率，兼顧彈性和固化速度，開(kāi)發(fā)了適用于微壓印工藝的高分辨率抗蝕劑材料，并進(jìn)行了勻膠、壓印和脫模工藝的優(yōu)化實(shí)驗。
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