The paper introduces the application method of cross magnetic field, the performance of DMZ-450 D. C. three pole sputtering apparatus, the quality of sputtered TiC coating and preliminary application of this coating.
英
美
- 并介紹了正交磁場(chǎng)的施加方法和DMZ-450型正交電磁場(chǎng)直流三極濺射爐的特性,它所沉積的TiC涂層質(zhì)量及其初步的應用效果。
