The other is electrostatic lens type that is rigorous but with high positioning precision of submicron, which leads the future of single ion microbeam(SIM).

 
  • 限流型結構簡(jiǎn)單但定位精度有限,聚焦型條件苛刻但可獲得亞微米束,是單離子束發(fā)展的趨勢。
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