The optimized technique on the titanium was: CH4/H2 1.11%-0.86-0.60 or CH4/(H2+Ar)1.09%-0.83%-0.59%, microwave power 700W,gas pressure 4.7KPa.

 
  • 或者甲烷/(氫氣+氬氣)1.;09%25-0
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