The modeling methodology based on the MWR (Method of Weighted Residuals), which may be the uniform modeling method of MEMS system-level simulation, is proposed.

 
  • 著(zhù)重介紹了適合于MEMS系統級仿真的兩個(gè)基本模型的基本思想、構造方法.提出用加權殘值法(MWR)建立MEMS系統級仿真模型;
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