The micro function module, such as micro channel, micro chamber, micro pump, micro heater and sensor etc, are manufactured by the technology of Micro Electro Mechanical System (MEMS) on the substrate of glass or silicon.是什么意思_The micro function module, such as micro channel, micro chamber, micro pump, micro heater and sensor etc, are manufactured by the technology of Micro Electro Mechanical System (MEMS) on the substrate of glass or silicon.在線(xiàn)翻譯_英語(yǔ)_讀音_用法_例句