The method of claim 21, wherein said film is a uniform film having electrical properties such that said semiconducting devices comprise insulated-gate field-effect transistors.

 
  • 根據權利要求21所述之方法,其中所述薄膜是一層具有電氣特性的均勻薄膜,從而所述半導體器件包括絕緣柵場(chǎng)效應晶體管。
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