The method according to claim 1, wherein the third step comprises a period of supplying the second process gas to the process field while exciting the second process gas by an exciting mechanism.是什么意思_The method according to claim 1, wherein the third step comprises a period of supplying the second process gas to the process field while exciting the second process gas by an exciting mechanism.在線(xiàn)翻譯_英語(yǔ)_讀音_用法_例句