The macro stage tracks input signal, actual displacement is measured by linear encoder as inner servo loop.

 
  • 采用雙伺服環(huán)控制策略,由宏動(dòng)機構跟蹤輸入信號,由精密光柵尺檢測宏動(dòng)機構的實(shí)際位移進(jìn)行反饋構成內伺服環(huán);
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