The influence of vibration has already become one of main obstacles for improving the nano measuring accuracy, the technique of anti-vibration, vibration isolation, vibration compensation turns into a big branch in nano measuring field.
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- 振動(dòng)的影響是提高納米測量精度的主要障礙,因此,抗振、隔振、振動(dòng)補償技術(shù)成為納米測量領(lǐng)域的一大分支。
