The influence of N2 partial pressure,deposition temperature and deposition time on the transmission properties of the BCN thin films were studied.

 
  • 通過(guò)改變氮氣分壓比、襯底溫度及沉積時(shí)間,研究了沉積參量對薄膜光透過(guò)性質(zhì)的影響。
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