The high-temperature piezoresis-sensitive chip was packaged on the Pyrex glass ring with electrostatic bonding process, so the elastic sensitive element with reversed cup structure was obtained.

 
  • 耐高溫壓阻力敏芯片通過(guò)靜電鍵合工藝封接在硼硅玻璃環(huán)上,得到高頻響倒杯結構的彈性敏感單元。
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