The distribution of the microwave plasma were measured by Langmuir probe and the temperature distribution of the microwave plasma in quartz tube reactor by the thermal couple meter.

 
  • 針對矩形波導微波化學(xué)反應器,在低氣壓,低功率,純甲烷微波放電情況下,用朗繆爾探針測量了石英反應管內等離子體的分布,用熱偶計測量了微波等離子體在空間的溫度分布。
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