The development of MEMS prototypical piezoelectric micro-motor got along with the fundamental, driving mechanism, tiny dimension, simplest structure and maxim power output potential analysis of the piezoelectric motor.
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- 微機械壓電微電機原型機研究在壓電電機的基本理論、致動(dòng)機理、總體尺寸微型化、最簡(jiǎn)化結構設計和極限動(dòng)力性能潛力分析方面取得了實(shí)質(zhì)性進(jìn)展。
