The dependence of the TFT properties on the active layer thickness is also analysised, and the best active thickness is about 200 nm, which is basically consistent with experiment results.

 
  • 文中從理論上分析了有源層厚度與 TFT特性的關(guān)系 ,計算的最佳有源層的厚度約為 2 0 0 nm,這與實(shí)驗結果基本一致。
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