The cathode vacuum arc ion source and ion implantation facility have been developed in our institute for industrial application of surface modification of materials.

 
  • 摘要為發(fā)展金屬離子束材料表面改性技術(shù)的工業(yè)應用,北師大低能核物理所研制成陰極真空弧離子源和離子注入裝置。
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